产品介绍: 稀释剂(OK73):70%的 PGME( 单甲基醚丙二醇) 和 30% 的PGMEA( 丙二醇甲醚醋酸酯)组成。 产品用途: 用于设备管路清洗以及除去晶圆边缘,背面,以及涂刷机容器杯上的光阻剂。
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Diluent ok73
CAS number:unknown molecular formula:
overview
compound introduction
Specs
| Chinese alias | 光阻稀释剂 | ||
| English alias | - | ||
| CAS number | unknown | molecular formula | |
| molecular weight | - | Exact mass | UP-S级,单个金杂≤0.1ppb |
| PSA | - | logp | - |
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