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Diluent ok73

CAS number:unknown    molecular formula:

overview

compound introduction

产品介绍: 稀释剂(OK73):70%的 PGME( 单甲基醚丙二醇) 和 30% 的PGMEA( 丙二醇甲醚醋酸酯)组成。 产品用途: 用于设备管路清洗以及除去晶圆边缘,背面,以及涂刷机容器杯上的光阻剂。

Specs

Chinese alias光阻稀释剂
English alias-
CAS numberunknownmolecular formula
molecular weight-Exact massUP-S级,单个金杂≤0.1ppb
PSA-logp-

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