Tetrakis(dimethylamido)zirconium(IV)

Dangerous Goods

CAS number：19756-04-8 molecular formula：[(CH3)2N]4Zr

overview

Specs

numbering system

physicochemical properties

Safety information

Production methods and uses

MSDS

overview

compound introduction

应用四（二甲基氨基）锆 (IV)可用作锆原子层沉积的前驱物，其应用范围从气体传感器到微电子学中的高k电介质。 Application Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.

Specs

Chinese alias	TDMAZ, 四(二甲基氨基)锆(IV)
English alias	Tetrakis(dimethylamido)zirconium(IV), deposition grade \| TDMAZ \| Tetrakis(dimethylamino)zirconium(IV), 99% (99.99%-Zr) TDMAZ, contained in 50ml Swagelok? cylinder for CVD/ALD \| SCHEMBL77142 \| Tetrakis(dimethylamido)zirconium(IV), packaged for use in depos
CAS number	19756-04-8	molecular formula	[(CH3)2N]4Zr
molecular weight	267.53 g/mol	Exact mass	-
PSA	4.000 Å²	logp	-

numbering system

No numbering system information yet

physicochemical properties

No physical and chemical property information yet

Safety information

pictogram：

GHS07 , GHS02

Signal word：

Warning

Hazard Statement：

H315: 引起皮肤刺激 H319: 引起严重眼睛刺激 H335: 可能引起呼吸道刺激 H228: 易燃固体 H261: 与水接触释放出易燃气体

Statement of Preventive Measures：

P261: 避免吸入灰尘/烟雾/气体/雾/蒸汽/喷雾 P305+P351+P338: 如进入眼睛：用水小心冲洗几分钟。如戴隐形眼镜并可方便地取出，取出隐形眼镜。继续冲洗。 P280: 戴防护手套/穿防护服/戴防护眼罩/戴防护面具。 P231+P232: 在惰性气体中操作。防潮。 P370+P378: 火灾时：使用干砂、干粉或抗醇泡沫灭火。 P210: 远离热源，热表面，火花，明火和其他点火源。 - 禁止抽烟。 P302+P352: 如皮肤沾染：用水充分清洗。 P321: 特殊处理（请参阅此标签上的...）