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Palladium(II) hexafluoroacetylacetonate

Dangerous Goods

CAS number：64916-48-9    molecular formula：Pd(C5HF6O2)2

overview
Specs
numbering system
physicochemical properties
Safety information
Production methods and uses
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MSDS
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overview

compound introduction

用于氧化还原金属置换反应，以优化铜的化学气相沉积合金化工艺。还用于同时进行铜的蚀刻和钯的沉积，从而应用于超大规模集成设备。 Used in a redox transmetalation reaction to enhance CVD alloying technology for copper. Also used in the simultaneous etching of copper and deposition of palladium for applications in ultra large-scale integrated devices.

Specs

Chinese alias二(六氟乙酰丙酮)钯
English aliasMFCD00015709 | 1,1,1,5,5,5-hexafluoro-4-hydroxypent-3-en-2-one;palladium | SY044749
CAS number64916-48-9molecular formulaPd(C5HF6O2)2
molecular weight520.52 g/molExact mass≥98%
PSA-logp-

numbering system

No numbering system information yet

physicochemical properties

No physical and chemical property information yet

Safety information

pictogram：
GHS07
Signal word：
Warning
Hazard Statement：
H315: 引起皮肤刺激 H319: 引起严重眼睛刺激 H335: 可能引起呼吸道刺激
Statement of Preventive Measures：
P261: 避免吸入灰尘/烟雾/气体/雾/蒸汽/喷雾 P305+P351+P338: 如进入眼睛：用水小心冲洗几分钟。如戴隐形眼镜并可方便地取出，取出隐形眼镜。继续冲洗。 P280: 戴防护手套/穿防护服/戴防护眼罩/戴防护面具。 P302+P352: 如皮肤沾染：用水充分清洗。 P321: 特殊处理（请参阅此标签上的...）。 P405: 密闭存放 P501: 将内容物/容器处理到。。。 P264: 处理后要彻底洗手。 P271: 仅在室外或通风良好的地方使用。 P304+P340: 如误吸入：将人转移
WGK Germany：
3
Personal protective equipment：
dust mask type N95 (US), Eyeshields, Gloves

Production methods and uses

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upstream information

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MSDS

Found 1 shareMSDS
64916-48-9 | Palladium(II) hexafluoroacetylacetonate.pdf